A charged-particle multi-beam exposure apparatus (1) for exposure of a
target
(41) uses a plurality of beams of electrically charged particles, which
propagate along parallel beam paths towards the target (41). For each particle
beam an illumination system (10), a pattern definition means (20)
and a projection optics system (30) are provided. The illuminating system
(10) and/or the projection optics system (30) comprise particle-optical
lenses having lens elements (L1, L2, L3, L4, L5)
common to more than one particle beam. The pattern definition means (20)
defines a multitude of beamlets in the respective particle beam, forming its shape
into a desired pattern which is projected onto the target (41), by allowing
it to pass only through a plurality of apertures defining the shape of beamlets
permeating said apertures, and further comprises a blanking means to switch off
the passage of selected beamlets from the respective paths of the beamlets.