A (meth)acrylate represented by the following formula (1):
##STR1##
wherein each of R1, R2, R3 and R4 represents
a hydrogen atom, a methyl group or an ethyl group; either one of X1 or
X2 represents a (meth)acryloyloxy group and the other represents a hydrogen
atom; both A1 and A2 represent hydrogen atoms, or A1
and A2 form —O—, —CH2— or —CH2CH2—,
which can be produced by first producing a lactone by reducing an addition product
obtained by the Diels-Alder reaction between 1,3-diene and maleic anhydride,
and then hydrating the lactone to produce an alcohol followed by (meth)acrylation
of the alcohol; a polymer produced by (co)polymerizing a monomer composition comprising
the (meth)acrylate of the present invention is excellent in transparency, dry etching
resistance, and solubility in organic solvents, and so it is preferably used as
a resin for a chemically amplified resist composition.