A method and structure that provides a battery within an integrated circuit for
providing voltage to low-current electronic devices that exist within the integrated
circuit. The method includes Front-End-Of-Line (FEOL) processing for generating
a layer of electronic devices on a semiconductor wafer, followed by Back-End-Of-Line
(BEOL) integration for wires connecting the electronic devices together to form
completed electrical circuits of the integrated circuit. The BEOL integration includes
forming a multilayered structure of wiring levels on the layer of electronic devices.
Each wiring level includes conductive metallization (e.g., metal-plated vias, conductive
wiring lines, etc.) embedded in insulative material. The battery is formed during
BEOL integration within one or more wiring levels, and the conductive metallization
conductively couples positive and negative terminals of the battery to the electronic
devices. The battery may have several different topologies relative to the structural
and geometrical relationships among the battery electrodes and electrolyte. Multiple
batteries may be formed within one or more wiring levels, and may be conductively
coupled to the electronic devices. The multiple batteries may be connected in series
or in parallel.