The present invention discloses a semiconductor device having a floating trap
type nonvolatile memory cell and a method for manufacturing the same. The method
includes providing a semiconductor substrate having a nonvolatile memory region,
a first region, and a second region. A triple layer composed of a tunnel oxide
layer, a charge storing layer and a first deposited oxide layer on the semiconductor
substrate is formed sequentially The triple layer on the semiconductor substrate
except the nonvolatile memory region is then removed. A second deposited oxide
layer is formed on an entire surface of the semiconductor substrate including the
first and second regions from which the triple layer is removed. The second deposited
oxide layer on the second region is removed, and a first thermal oxide layer is
formed on the entire surface of the semiconductor substrate including the second
region from which the second deposited oxide layer is removed. The semiconductor
device can be manufactured according to the present invention to have a reduced
processing time and a reduced change of impurity doping profile. The thickness
of a blocking oxide layer and a high voltage gate oxide layer can be controlled.