A catadioptric projection lens for imaging a pattern arranged in an object plane
while creating a real intermediate image, having a catadioptric first lens section
having a concave mirror and a beam-deflection device, as well as a dioptric second
lens section that follows the catadioptric lens section, between its object plane
and image plane. The beam-deflection device deflects radiation coming from the
object plane to the concave mirror. Positive refractive power is arranged following
the first reflective surface, between the latter and the concave mirror, within
an optical near-field of the object plane, within which the height of the principal
ray of the outermost field point of radiation coming from the object exceeds the
marginal-ray height. The intermediate image is arranged prior to light which forms
the intermediate image being reflected by a second reflective surface that is provided
for the purpose of allowing arranging the object plane and image plane such that
they will be parallel to one another.