Using a solid immersion lens (SIL) having a spherical lens surface with a radius
of curvature RL from a material having a refractive index nL,
an image of a sample is observed. A geometric aberration characteristic caused
by the SIL is evaluated by using a predetermined optical system. Using a coefficient
k (0k1) set to satisfy a condition where the average image surface
becomes flat or a condition yielding a favorabl chromatic aberration characteristic,
the sample is observed with the solid immersion lens while a surface, orthogonal
to the optical axis, including a point located downstream of the spherical center
c of the lens surface 10 by (k(RL/nL) along
the optical axis, is employed as a sample observation surface 20. This realizes
a sample observation method that can observe the image of the sample favorably
with a solid immersion lens, and the solid immersion lens.