An apparatus and method are provided for manufacturing an electrode of hydrous
ruthenium oxide thin film, consisting of an injector for spraying a precursor solution,
a substrate for depositing the precursor solution, a base for supporting the substrate
and a halogen lamp for heating the substrate, a DC power supply connected to the
injector and base, a space adjuster for adjusting the spraying space between the
injector and the base, and temperature controller for controlling the temperature
of the base. Because of the strong electric field, the sprayed ruthenium precursor
solution atomizes the nano-sized very fine particles. Therefore, the atomized particles
are deposited on the substrate to form a very fine porous thin film under the influence
of electrically charged molecular actions without the influence of gravitation
force. The ruthenium oxide electrode formed the fine porous thin film has excellent
property of super capacitor, composite electrode of ruthenium oxide and activated carbon.