A structure and method are provided for dissipating heat from a semiconductor
device
chip. A first layer of a dielectric material (e.g. polyimide) is formed on a front
side of a heat spreader (typically Si). A plurality of openings are formed through
this first layer; the openings are filled with metal (typically Cu), thereby forming
metal studs extending through the first layer. A second layer of metal is formed
on the backside of the device chip. The first layer and the second layer are then
bonded in a bonding process, thereby forming a bonding layer where the metal studs
contact the second layer. The bonding layer thus provides a thermal conducting
path from the chip to the heat spreader.