An array of NROM flash memory cells configured to store at least two bits per
four F2. Split vertical channels are generated along each side of adjacent
pillars. A single control gate is formed over the pillars and in the trench between
the pillars. The split channels can be connected by an n+ region at the bottom
of the trench or the channel wrapping around the trench bottom. Each gate insulator
is capable of storing a charge that is adequately separated from the other charge
storage area due to the increased channel length.