The present invention provides new high resolution nanocomposite resists applicable
to next generation lithographies, methods of making these novel resists, and methods
of using these new resists in lithographic processes to effect state-of-the-art
lithographies. New nanocomposite negative resists comprising a photoacid generating
component, a styrene component, and an optional polyhedral oligosilsequioxane component
are provided. Negative resists of this invention may also contain an optional methacrylate
component. This invention and the embodiments described herein constitute fundamentally
new architectures for high resolution resists.