An actuator to which leads are easily attachable, and a method of making the
same
are provided. In the actuator in accordance with the present invention, a pair
of silicon arms have their resistances lowered by being doped with impurities and
are connected to each other by way of a glass substrate. A predetermined surface
of each silicon arm is formed with a piezoelectric part, whereas a predetermined
surface of the piezoelectric part is formed with a thin-film electrode. Therefore,
the piezoelectric part is driven when a voltage is applied between a bonding wire
attached to the thin-film electrode and a bonding wire attached to the silicon
arm. Since the bonding wire can be attached to the silicon arm at any position
thereon, wire bonding can be carried out while appropriately selecting positions
and surfaces where the bonding wire is easily attachable.