A micro-electro-mechanical system (MEMS) device includes a mirror having a top
surface with trenches, a beam connected to the mirror, rotational comb teeth connected
to the beam, and one or more springs connecting the beam to a bonding pad. The
mirror can have a bottom surface for reflecting light. The mirror can include a
top flange and a bottom flange joined by a web, wherein the top and the bottom
flanges form the top and the bottom surfaces, respectively. The rotational comb
teeth can have a tapered shape. Stationary comb teeth can be interdigitated with
the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating
voltage difference between the rotational and the stationary comb teeth can be
used to oscillate or tune the mirror.