An interconnect is provided for making electrical connections with a semiconductor
die. The interconnect includes a substrate having integrally formed contact members,
configured to electrically contact corresponding contact locations on the die.
The interconnect also includes a pattern of conductors formed separately from the
substrate, and then bonded to the substrate, in electrical communication with the
contact members. The conductors can be mounted to a multi layered tape similar
to TAB tape, or alternately bonded directly to the substrate. In addition, each
conductor can include an opening aligned with a corresponding contact member, and
filled with a conductive material, such as a conductive adhesive or solder. The
conductive material electrically connects the contact members and conductors, and
provides an expansion joint to allow expansion of the conductors without stressing
the contact members. Also provided are a system for testing dice that includes
the interconnect, and a system for testing wafers wherein the interconnect is formed
as a probe card.