Epoxy probe cards are modified by mounting passive and/or active electronic
components on the insulating surface of the probe card and connecting those components
to the probe wires with short, electrically conductive lines that are formed on
the probe card surface by printed circuit techniques. Ordinary wire probes may
be interspersed with coaxial probes and probes with electrically conducting tips
bonded to electrically insulating shanks. An auxiliary printed circuit board containing
additional electronic components may be included to accommodate especially sensitive
test points. The resulting probe structure is intended to extend the frequency
range of the well-developed epoxy probe card technology while retaining its ruggedness
and low cost features.