A carrier robot system and a control method for a carrier robot enabling
teaching even when an operator cannot approach a teaching position for
wafer conveyance are provided.
In a carrier robot system comprising a robot (1) which has a placement
portion for placing an object presenting a low-profile form thereon and
carries the object and a robot controller (9) for controlling the robot
(1), a jig (3) mounted on the placement portion of the robot and having
an image pickup member (4), an image processing portion (8) for
processing an image picked up by the image pickup member (4), and a
superior control portion (10) for controlling the robot controller (9)
and image processing portion (8) from a superior position are provided.