Disclosed are a photosensitive resin composition comprising a photosensitive
resin (A), a photopolymerization initiator (B), and a flame retardant (C), in which
a content of halogen atoms or antimony atoms in the flame retardant is 5% or less
by weight; a photosensitive element using this; a method of manufacturing a resist
pattern; a resist pattern; and a resist pattern laminated substrate.