An actuator 1 in which a displacement element 7 has a piezoelectric ceramic layer 4 and a pair of electrodes 5, 6 interposing therebetween the piezoelectric ceramic layer 4. The entire thickness of the actuator 1 is 100 m or less. The piezoelectric ceramic layer 4 and the substrate 2 have as their principal component a perovskite crystal containing at least Pb; Zr and Ti, and, the maximum difference in a composition ratio Pb/(Ti+Zr) between the surface of the piezoelectric ceramic layer 4 and the inside of the substrate 2 is 0.02 or less. This reduces characteristic variation.

 
Web www.patentalert.com

< Pan handle

< Vehicle braking system master cylinder

> Semiconductor device and method of manufacturing the same comprising thin film containing low concentration of hydrogen

> Power supply unit having multiple power supply outputs

~ 00264