A method for manufacturing a microstructure, which includes at least one
feature having a dimension less than 200 nm, on a work piece. Pulses of
UV laser light having a duration of less than about 1 ps and a peak
wavelength of less than about 380 nm are generated. These pulses of UV
laser light are focused to a substantially diffraction limited beam spot
within a target area of the work piece. The fluence of this substantially
diffraction limited beam spot in the target area of the work piece is
controlled such that the diameter of the section of the target area
machined by one of the pulses of UV laser light is less than 200 nm.