The present invention provides a single-electron transistor device (100).
The device (100) comprises a source (105) and drain (110) located over a
substrate (115) and a quantum island (120) situated between the source
and drain (105, 110), to form tunnel junctions (125, 130) between the
source and drain (105, 110). The device (100) further includes a movable
electrode (135) located adjacent the quantum island (120) and a
displaceable dielectric (140) located between the moveable electrode
(135) and the quantum island (120). The present invention also includes a
method of fabricating a single-electron device (200), and a transistor
circuit (300) that include a single-electron device (310).