An optical proximity effect correcting method in a semiconductor
manufacturing process includes adding, detecting, judging, and deleting.
The adding includes adding a first correcting region around a portion of
a first design pattern. The portion faces a second design pattern. A
first corrected design pattern includes the first correcting region and
the first design pattern. The detecting includes detecting a space
between the first corrected design pattern and the second design pattern.
The judging includes judging whether the space is smaller than or equal
to a predetermined value. The deleting includes deleting at least a
portion of the first correcting region such that the space is larger than
the predetermined value, when the space is smaller than or equal to the
predetermined value.