To provide a mask able to prevent a drop in pattern position accuracy due
to the influence of internal stress of a membrane and able to align
patterns including complementary divided patterns precisely, a method of
producing the same, and a method of producing a semiconductor device. A
stencil mask having lattice-shaped struts formed by etching a silicon
wafer on four regions of a membrane wherein the lattices are offset from
each other in the four regions and all of the struts are connected to
other struts or the silicon wafer around the membrane (frame), a method
of producing a stencil mask, and a method of producing a semiconductor
device.