An aluminum interconnect which extends adjacent to and is insulated from a
stacked capacitor structure to facilitate electrical communication
between an active device region of a semiconductor substrate of a
semiconductor device structure and a bit line extending above the
semiconductor substrate. The aluminum interconnect is disposed within a
trench and may include a metal silicide layer adjacent the active device
region to form a buried metal diffusion layer. The aluminum interconnect
may also include a metal nitride layer disposed between the metal
silicide and aluminum. The invention also includes methods of fabricating
aluminum interconnects adjacent stacked capacitor structures and
semiconductor device structures which include the aluminum interconnects.