The invention provides a pump with high driving efficiency in which the
number of mechanical switching valves is decreased to reduce pressure
loss and increase reliability, and which is ready for high load pressure
and high-frequency driving, and which increases the discharged fluid
volume for one cycle of pumping. A circular diaphragm arranged on the
bottom of a casing has the outer edge fixed to the casing. The diaphragm
includes a piezoelectric element to move the diaphragm on the bottom
surface thereof. The space between the diaphragm and the top wall of the
casing serves as a pump chamber, wherein a suction channel and a
discharge channel are opened to the pump chamber, the suction channel
having a check valve serving as a fluid resistive element and the
discharge channel being always communicated with the pump chamber, even
during the operation of the pump. In the pump, the activation of the
piezoelectric element is controlled by a cycle control device so as to
provide the cycle of the diaphragm in which the volume and the pressure
of the discharged fluid of the pump are increased.