To provide a technique for manufacturing a high-performance display device
by employing a plastic substrate. A peeling layer is formed on an
element-forming substrate, and a semiconductor element and a luminous
element are further formed thereon. Then, a fixed substrate (130) is
bonded on the luminous element by using a first adhesive (129). The
entire substrate in this state is exposed in a gas containing halogen
fluoride to thereby remove the peeling layer and separate the
element-forming substrate. Thereafter, a bonding substrate (132) that
comprises a plastic substrate is bonded in place of the separated
element-forming substrate.