Disclosed is a fabricating system including a plurality of processing
apparatuses connected to each other by means of an inter-apparatus
transporter, wherein one group of semiconductor wafers are processed in
processing apparatuses and other group of wafers are transported to
specified processing apparatuses for a time interval from (To+T) to a
time To; and another group of wafers are processed and the remaining
group of wafers are transported for a time interval from (To+T) to
(To+2T). Since processing apparatuses can receive at least one of works
from the inter-apparatus transporter for a time interval T min, the
distribution of works from the transporter to processing apparatuses is
completed for the time interval T min. The transporter is emptied for
each time interval T min, and works are unloaded to the emptied
transporter, which makes easy the scheduling, control and management of
the transporting of a plurality of works in the fabricating system.
Moreover, since the fabricating system including processing apparatuses
is periodically controlled at a cycle time T min, the scheduling of a
plurality of works can be made easy, to enhance the level of
optimization, thus improving the productivity.