A subtraction results value arrived at by subtracting a required
subtraction value from a detection maximum value is taken as a maximum
value in cases where a detection maximum value obtained from an RF signal
is in a reducing direction, and an addition results value arrived at by
adding a required value to a detection minimum value is taken as a
minimum value in cases where a detection minimum value obtained from an
RF signal is in an increasing direction. An RF amplitude value indicating
an amplitude level of an RF signal is then obtained by subtracting the
minimum value from the maximum value. Also, the subtraction value or the
addition value is variably set according to the center value for the
amplitude of the RF signal increasing or decreasing in excess of a
prescribed level. As a result, accuracy of defect detection can be
improved in cases where the amplitude level of the RF signal is biased on
the maximum value side or the minimum value side.