A design of a vertical cavity surface emitting laser chip suitable for
high speed data communication. An intracavity contact to the doped layers
of the bottom mirror is formed so that both contacts are on the top
epitaxial side of the wafer. These main structural features can be used
to reduce the bond pad capacitance by a suitable spatial separation of
metallizations of the p and n contact. The bond pads are processed as a
short symmetric coplanar line in a ground signal ground configuration
which allows flexible device testing and packaging. A significant
capacitance between the pads of the center strip and the outer ground
strips is avoided by etching the doped semiconductor layers between these
strips down to the semi-insulating substrate. This design avoids pad
metallizations and the corresponding critical photolithographic steps
over large height differences from the vertical cavity surface emitting
laser mesa top to the substrate. This insures good lithographic fidelity
and makes the process reproducible.