Microelectronic packages having chambers and sealing materials, and
methods of making the packages, and sealing the chambers, are disclosed.
An exemplary package may include a first surface, a second surface, a
solid sealing material including an intermetallic compound, such as, for
example, of gallium or another relatively low melting material, between
the first surface and the second surface, and a chamber defined by the
first surface, the second surface, and the sealing material. An exemplary
method may include disposing a ring of a sealing material including a
liquid metal between a first surface and a second surface to define a
chamber between the first surface, the second surface, and the ring of
the sealing material, and sealing the chamber by heating the sealing
material to react the liquid metal with a metal that is capable of
forming an intermetallic compound with the liquid metal.