A porous adhesive sheet 1 having plural through holes 2 running in about
parallel with each other in the thickness direction A of an adhesive
organic film 3, wherein the through holes have about congruent sections
in the diameter direction from one opening 2a to the other opening 2b and
a production method thereof, and a semiconductor wafer with a porous
adhesive sheet 31, which includes a semiconductor wafer 32 having an
electrode 33, the porous adhesive sheet 1 adhered to the semiconductor
wafer, and a conductive part 34 formed by filling a through hole 2
located on the electrode 33 with a conductive material, and a production
method thereof are provided.