An integrated circuit with both P-channel transistors (823) and N-channel
transistors (821) with different spacer insulating region widths. In one
example, the outer sidewall spacer (321) of the N-channel transistors is
removed while the P-channel regions (115) are masked such that the spacer
insulating region widths of the N-channel transistors is less than the
spacer insulating region widths of the P-channel transistors. Also, the
drain/source silicide regions (805) of the N-channel transistors are
located closer to the gates (117) of those transistors than the P-channel
source/drain suicide regions (809) are located to the gates (119) of
those transistors. Providing the P-channel transistors with greater
spacer insulating widths and greater distances between the source/drain
silicide regions and gates may increase the relative compressive stress
of the channel region of the P-channel transistors relative the stress of
the channel region of the N-channel transistors, thereby increasing the
performance of the P-channel transistors.