A conveyor system able to safety convey a workpiece having a thickness of
less than 100 .mu.m and easily position the workpiece, provided with a
plate-shaped member provided movably and swivelably and a moving and
swiveling means moving and swiveling the plate-shaped member, the
plate-shaped member being provided together with a lifting means for
uniformly lifting in its entirety a workpiece carried at the carrying
location and a holding means for holding a workpiece lifted by the
lifting means by chucking its entirety on a workpiece chucking surface of
the plate-shaped member, and a plurality of Verneuil nozzles serving as
the lifting means and a plurality of vacuum chucking nozzles serving as
the holding means being formed in the workpiece chucking surface near an
outer periphery of the plate-shaped member along the outer periphery.