The present invention provides a resin-encapsulated semiconductor
apparatus comprising a semiconductor device having a ferroelectric film
and a surface-protective film, and an encapsulant member comprising a
resin; the surface-protective film being formed of a polyimide. The
present invention also provides a process for fabricating a
resin-encapsulated semiconductor apparatus, comprising the steps of
forming a film of a polyimide precursor composition on the surface of a
semiconductor device having a ferroelectric film; heat-curing the
polyimide precursor composition film to form a surface-protective film
formed of a polyimide; and encapsulating, with an encapsulant resin, the
semiconductor device on which the surface-protective film has been
formed. The polyimide may preferably have a glass transition temperature
of from 240.degree. C. to 400.degree. C. and a Young's modulus of from
2,600 MPa to 6 GPa. The curing may preferably be carried out at a
temperature of from 230.degree. C. to 300.degree. C.