Structures and methods for Flash memory with low tunnel barrier intergate
insulators are provided. The non-volatile memory includes a first
source/drain region and a second source/drain region separated by a
channel region in a substrate. A floating gate opposing the channel
region and is separated therefrom by a gate oxide. A control gate opposes
the floating gate. The control gate is separated from the floating gate
by a low tunnel barrier intergate insulator. The low tunnel barrier
intergate insulator includes a metal oxide insulator selected from the
group consisting of PbO, Al.sub.2O.sub.3, Ta.sub.2O.sub.5, TiO.sub.2,
ZrO.sub.2, and Nb.sub.2O.sub.5. The floating gate includes a polysilicon
floating gate having a metal layer formed thereon in contact with the low
tunnel barrier intergate insulator. And, the control gate includes a
polysilicon control gate having a metal layer formed thereon in contact
with the low tunnel barrier intergate insulator.