There are provided a resist composition that produces a resist pattern of
good shape, and a method of forming a resist pattern that uses such a
resist composition. The resist composition comprises a resin component
(A) that undergoes a change in alkali solubility under the action of
acid, an acid generator component (B) that generates acid on exposure,
and an organic solvent (C), wherein the component (B) comprises a
compound represented by a general formula (I) shown below [wherein,
R.sup.1 to R.sup.3 each represent, independently, a methyl group or an
ethyl group; and X.sup.- represents an anion].