A ferroelectric memory device and a method of fabricating the same are
provided. The device includes a substrate where a conductive region is
formed and an interlayer insulating layer. The interlayer insulating
layer is stacked on the substrate and has a contact hole exposing the
conductive region. The contact hole is filled with a contact plug having
a projection over the interlayer insulating layer. The projection of the
contact plug is covered with a capacitor including a lower electrode, a
ferroelectric layer pattern, and an upper electrode. A width of the
projection is preferably greater than that of the contact hole and
smaller than that of the lower electrode. The method includes forming
lower and upper interlayer insulating layers on a substrate where a
conductive region is formed. The lower and upper interlayer insulating
layers have a contact hole exposing the conductive region. After forming
a conductive contact plug filling the contact hole, the upper interlayer
insulating layer is removed to expose the lower interlayer insulating
layer. Thus, an upper portion of the contact plug that is higher than the
lower interlayer insulating layer is projected. Continuously, a lower
electrode, a ferroelectric layer pattern, and an upper electrode
sequentially cover the projected contact plug to form a capacitor. The
upper interlayer insulating layer is preferably made of a material having
an etch selectivity with respect to the lower interlayer insulating
layer. The contact hole is preferably formed such that a width of the
contact hole formed in the upper interlayer insulating layer is greater
than that of the contact hole formed in the lower interlayer insulating
layer.