A multi-layered unit according to the present invention includes a support
substrate formed of fused quartz, an electrode layer formed on the
support substrate, made of BSCCO (bismuth strontium calcium copper oxide)
having a stoichiometric composition represented by
Bi.sub.2Sr.sub.2CaCu.sub.2O.sub.8, having an anisotropic property and
conductivity and enabling epitaxial growth of a dielectric material
containing a bismuth layer structured compound thereon and oriented in
the c axis direction, and a dielectric layer formed by epitaxially
growing a dielectric material containing a bismuth layer structured
compound having a composition represented by SrBi.sub.4Ti.sub.4O.sub.15
on the electrode layer. Since the thus constituted multi-layered unit
includes the dielectric layer containing the bismuth layer structured
compound oriented in the c axis direction, in the case of, for example,
providing an upper electrode on the dielectric layer to form a thin film
capacitor and applying a voltage between the electrode layer and the
upper electrode, the direction of the electric field substantially
coincides with the c axis of the bismuth layer structured compound. As a
result, since the ferroelectric property of the bismuth layer structured
compound contained in the dielectric layer can be suppressed and the
paraelectric property thereof can be fully exhibited, it is possible to
fabricate a thin film capacitor having a small size and large
capacitance.