A freely rotatable micromechanical plate is achieved by employing at least
three rotatable plates that are each suspended from a substrate via
respective springs, and are coupled via other respective springs to at
least three moveable plate attachment points, so that rotation of the
rotatable plates about an axis transfers motion to the moveable plate
attachment points. Respective posts couple the movement of each
respective moveable plate attachment point to a moveable plate. In
operation, the rotatable plates may be individually rotated, and the
resulting motion of each rotatable plate is passed to its respective
moveable plate attachment point. The combined motion of the moveable
plate attachment points is passed to the moveable plate via the posts.
Using proper control, the plate may be made to tip, tilt and piston.
Advantageously, the piston motion may achieve a high vertical movement
frequency response.