A microvalve for controlling fluid flow, including a body portion having a
plurality of spaced openings formed therein, a shutter located adjacent
to and substantially parallel with the body portion having a plurality of
spaced openings formed therein, a drive mechanism for causing the shutter
to move laterally with respect to the body portion so that the spaced
openings of the shutter are brought into and out of alignment with the
spaced openings of the body portion, wherein the microvalve is in an open
position and a closed position, respectively, and, a latching mechanism
for preventing the shutter from moving laterally with respect to the body
portion.