An inductor and a method of forming and the inductor, the method
including: (a) providing a semiconductor substrate; (b) forming a
dielectric layer on a top surface of the substrate; (c) forming a lower
trench in the dielectric layer; (d) forming a resist layer on a top
surface of the dielectric layer; (e) forming an upper trench in the
resist layer, the upper trench aligned to the lower trench, a bottom of
the upper trench open to the lower trench; and (f) completely filling the
lower trench at least partially filling the upper trench with a conductor
in order to form the inductor. The inductor including a top surface, a
bottom surface and sidewalls, a lower portion of said inductor extending
a fixed distance into a dielectric layer formed on a semiconductor
substrate and an upper portion extending above said dielectric layer; and
means to electrically contact said inductor.