A method of forming a low-voltage drive thin film ferroelectric capacitor
includes the steps of depositing a ferroelectric and platinum thin film
dielectric layer over a bottom electrode, annealing the dielectric layer,
wherein a nanocomposite layer is formed including nanoparticles of
platinum and forming a top electrode over the dielectric layer. An
integrated circuit is also provided including a ferroelectric capacitor.
The capacitor includes a bottom electrode formed over a substrate and a
ferroelectric and platinum thin film nanocomposite dielectric layer
formed over the bottom electrode, wherein the nanocomposite layer
includes nanoparticles of platinum. A top electrode is formed over the
dielectric layer.