A new technique to synthesize barium titanate (BaTiO.sub.3) on homogeneous
substrates (titanium) or heterogeneous substrates (silicon wafers, metal,
glass, ceramics, polymers, other metals, etc.) is disclosed to include a
first step to deposit a titanium film on a substrate by sputtering, and a
second step to synthesize barium titanate film with uniformly dispersed
spherical particles on the titanium-coated substrate in a electrolyte
containing barium ions by electrochemically anodic oxidation.