A negative resist composition is provided comprising a polymer comprising
recurring units having formula (1), a photoacid generator, and a
crosslinker. In formula (1), X is alkyl or alkoxy, R.sup.1 and R.sup.2
are H, OH, alkyl, substitutable alkoxy or halogen, R.sup.3 and R.sup.4
are H or CH.sub.3, n is an integer of 1 to 4, m and k are an integer of 1
to 5, p, q and r are positive numbers. The composition has a high
contrast of alkali dissolution rate before and after exposure, high
sensitivity, high resolution and good etching resistance.