A photoresist composition containing a polymer (A) containing an
alkali-soluble constituent unit (a1) containing an alicyclic group having
both a fluorine atom or a fluorinated alkyl group (i) and an alcoholic
hydroxyl group (ii), whose alkali-solubility is changeable by an action
of an acid; an acid generator (B) which generates an acid by light
irradiation; and a dissolution inhibitor (C) having a fluorine atom(s)
and/or a nitrogen-containing compound (D) selected from a tertiary amine
(d1) having a polar group, a tertiary alkylamine (d2) having 7 or more
and 15 or less of carbon atoms or an ammonium salt (d3). The composition
has a resist property capable of accomplishing line and space (1:1) of 90
nm or less in good shape as a pattern processing accuracy of a
semiconductor integrated circuit by lithography.