The sputter target includes a tantalum body having tantalum grains formed
from consolidating tantalum powder and a sputter face. The sputter face
has an atom transport direction for transporting tantalum atoms away from
the sputter face for coating a substrate. The tantalum grains have at
least a 40 percent (222) direction orientation ratio and less than a 15
percent (110) direction orientation ratio in an atom transport direction
away from the sputter face for increasing sputtering uniformity, the
tantalum body being free of (200) (222) direction banding detectable by
Electron Back-Scattering Diffraction and wherein the sputter target has a
purity of at least 99.99 (%) percent.