Disclosed are spectroscopic ellipsometer and combined spectroscopic
reflectometer/ellipsometer systems. The spectroscopic ellipsometer system
portion includes polarizer and analyzer elements which remain fixed in
position during data acquisition, and a step-wise rotatable compensator
electromagnetic beam transmitting means, which serves to enable imposing
a plurality of sequentially discrete, rather than continuously varying,
polarization states on said beam of electromagnetic radiation. Further
disclosed is a calibration procedure for said spectroscopic ellipsometer
system portion of the invention which involves the gathering of, for each
of a plurality of ellipsometrically distinct sample systems,
spectroscopic data at a sequential plurality of discrete electromagnetic
radiation beam polarization states, combined with providing of a
mathematical model of the spectroscopic ellipsometer system and
application of a mathematical regression procedure.