A method for developing an optimized layout fragmentation script for an
optical proximity correction (OPC) simulation tool. A test pattern layout
having at least one structure representing a portion of the integrated
circuit layout is provided. Optical proximity correction is iteratively
conducted on the test pattern layout for each desired permutation of at
least one fragmentation parameter associated with the test pattern layout
and, for each permutation, a corrected test pattern layout is generated.
A printed simulation of each corrected test pattern layout is made and
analyzed to select one of the permutations of the at least one
fragmentation parameter to apply to a integrated circuit layout prior to
correction with the OPC simulation tool.