Disclosed are a micromirror device made in a simple structure using
interdigitated cantilevers and having two stable rotational states, and
applications thereof. The micromirror device comprises: (a) a substrate;
(b) at least two protruded support posts arranged protrudedly in two
columns of left and right sides on the substrate and apart by a
predetermined interval from each other; (c) multiple cantilevers formed
in parallel with the substrate, each having one end attached at the upper
end portion of the respective protruded support posts and made in a thin
strip having an elastic restoring force, wherein the cantilevers adjacent
to each other are arranged to be parallel and interdigitated; (d) mirror
support posts coupled to upper portions of the other ends of the
cantilevers; (e) a mirror attached on upper portions of the whole mirror
support posts and supported by the mirror support posts; and (f) two
electrodes formed at left and right sides on the substrate, for providing
an electrostatic force to the mirror, wherein the micromirror device
reflects light incident into the mirror in different directions from each
other by using an electrostatic force due to a voltage applied between
the electrodes and the mirror, and the elastic restoring force of the
cantilevers. The micromirror device can drive the mirror in two
directions and adjust a rotational angle of the mirror using the
electrostatic force due to a potential difference between the electrodes
and the mirror for reflecting incident light, and the elastic restoring
force of the cantilevers.