Methods for measuring strains in circuit substrates such as circuit boards
and semiconductor wafers include illuminating a specimen with a
substantially collimated laser flux. A temperature change is produced in
the specimen and a series of laser speckle patterns produced by a laser
flux scattered or reflected by the specimen is recorded. Localized
strains are detected based on speckle pattern shifts that are calculated
using the recorded speckle patterns. Stains can be recorded as a function
of temperature or rate of change of temperature, and strains at one or
more circuit substrate locations can be detected.