Disclosed is a method of manufacturing integrated circuit chips that
partially joins an integrated circuit wafer to a supporting wafer at a
limited number of joining points. Once joined, the integrated circuit
wafer is chemically-mechanically polished to reduce the thickness of the
integrated circuit wafer. Then, after reducing the thickness of the
integrated circuit wafer, the invention performs conventional processing
on the integrated circuit wafer to form devices and wiring in the
integrated circuit wafer. Next, the invention cuts through the integrated
circuit wafer and the supporting wafer to form chip sections. During this
cutting process, the integrated circuit wafer separates from the
supporting wafer in chip sections where the integrated circuit wafer is
not joined to the supporting wafer by the joining points. Chip sections
where the integrated circuit wafer remains joined to the supporting wafer
are thicker than the chips sections where the integrated circuit wafer
separates from the supporting wafer.