A lithography equipment is provided, which includes: a coater coating a
substrate with resist; a first buffer storing the substrate supplied from
the coater; a baker baking the substrate supplied from the first buffer;
a first turn table rotating the substrate supplied from the baker; a
first transferor communicating the substrate with the coater, the first
buffer, the baker, and the first turntable; an exposer exposing light to
the substrate supplied from the first turntable; a developer developing
the resist on the substrate supplied from the exposer; and a second
transferor communicating the substrate with the first turntable, the
exposer, and the developer.